Parts Repair Service

部品修理

シリコンウェハメーカーに向けて、エピタキシャルウェハ成長装置のパーツ販売及び修理・改善を行っております。

APCが供給可能なセカンドソース品新品ボードリスト

部品番号	名称
0015-00421	MODIFICATION, ASSY, PCB, CHAMBER SET INT
0090-00475	ASSY EXPANDED SERIPLEX 210 MAINFRAME PRO
0100-00215	PCB ASSY, AC DIST
0100-00223	PCB WH I/F MBC AMPLIFIER
0100-00241	PCB ASSEMBLY TC AMP INTERLOCK 300XZ
0100-00244	PCB ASSEMBLY PRODUCER WAFER SLIDE DETECT
0100-00245	PCB, ASSY, CONTROLLER,INTERCONN. CH TRAY
0100-00246	PCB ASSY CHAMBER INTERCONN.CH TRAY M
0100-00293	PCB ASSY EXPANDED SERIPLEX INTERCONNNECT
0100-00294	PCB ASSY MAINFRAME SERIPLEX BACKPLANE
0100-00368	PCB, ASSY,CHAMBER TEMPERATURE MONITOR
0100-00372	CENTURA I/O EXPANSION PCBA
0100-00388	PCB ASSEMBLY , VIDEO/SERIAL INTERFACE
0100-00396	PCB, ANALOG I/O ASSY
0100-00422	MONITOR/KB/LP SWITCHBOX BD
0100-00423	PCB ASSY SERIPLEX I/O DISTRIBUTION
0100-00430	PCB, ASSEMBLY, VME P2 BACKPLANE
0100-00499	PCB ASSEMBLY, DC POWER/SERIPLEX BUS DIST
0100-00698	ASSEMBLY, PCB, CHAMBER LIFT RF FILTER
0100-00752	MAINFRAME INTERFACE BD
0100-00793	VGA Video controller board
0100-01383	MONITOR /KB/SERIAL LIGHT PEN/ INTERFACE BOARD
0100-01996	SEI Board
0100-09054	PCB ASSY, ANALOG INPUT
0100-09139	ASSY ROBOT EXTENSION SENSOR PCB
0100-09172	ASSY 8 CHANNEL EMISSION LASER EDPT BD
0100-09225	PCB ASSY, TC AMP/ INTERLOCK
0100-09286	PCB,SERIPLEX 2-SLT BACKPLANE
0100-09287	CENTURA APC MATRIX BOARD
0100-09293	ASSEMBLY,PCB LI/APC MATRIX
0100-11001	ANALOG OUTPUT BOARD
0100-13026	ASSY PCB, CHAMBER POWER DISTRIBUTION
0100-18039	ASSY, PCB, TC FILTER
0100-18051	ASSY, PCB, TC FILTER
0100-18058	TC AMP INTLK BD DXZ
0100-20006	PCB ASSY CHAMBER DRIVE BACKPLANE
0100-20007	PCB ASSY PNEUMATIC DISTRIBUTION
0100-20018	PCB ASSY, SYSTEM ELECTRONICS BACKPLANE
0100-20021	PCB ASSY, CHAMBER/A1 MUX DISTRIBUTION
0100-20039	PCB ASSY, RF GENERATOR BACKPLANE
0100-20041	PCB ASSY, SYSTEM FAIL DETECH
0100-20066	PCB ASSY, ANALOG SYNC DETECT
0100-20073	PCB ASSY WAFER DETECT
0100-20130	PCB ASSY, II CONTACTOR CONTROL
0100-20143	PCB ASSY L LOCK WAFER SENSOR
0100-20148	PCB ASSY WAFER LIFT/DRVR INTFC
0100-20169	ASSY PCB LED-NB FAST WAFER MAPPING
0100-20181	PCB ASSY, OPERATOR CONTROL PANEL WITH IN
0100-20299	9 POS EXPANDED DI/O BOARD
0100-35054	PCB ASSY,CHMBR INTERFACE
0100-35059	ASSY PCB REMOTES DIST
0100-35060	ASSY PCB CHAMBER POWER DISTRIBUTION
0100-35064	ASSY PCB AC DIST
0100-35065	PCB ASSY, SERIAL ISOLATOR
0100-35101	PCB ASSY, SYSTEM ELECTRONICS
0100-35124	PCB,SERIPLEX I/O DISTRIBUTION
0100-35173	PCB SERIPLEX POWER DISTRIBUTION
0100-35174	CENTURA APC MATRIX BOARD
0100-35231	PCB SERIPLEX I/O DISTRIBUTION GPLIS
0100-35263	ASSY, PCB AC DIST
0100-37858	ASSY PCB CHAMBER SET INTERCONNECT
0100-37868	PCB ASSY, CONTACTOR INTERLOCK, PRODUCER (Old P/N:0100-35086)
0100-37901	GAS PANEL SAFETY INTERLOCK PRODUCER CVD
0100-38036	ASSY PCB CHAMBER SET SERIPLEX BACKLANE
0100-70034	ASSY, PCB EP VGA INTERCONNECT
0100-76005	PCB ASSY, SERIAL/VIDEO/ DCN DISTRIBUTION
0100-76038	ASSY, PCB LED-NB, FAST WAFER MAPPING
0100-76065	PCBA, INTERCONNECT ASSY
0100-76087	CENTURA I/O EXPANSION PCBA
0100-76124	DIGITAL INPUT OUTPUT PCB
0130-00542	PCB ASSY,INTERCONNECT E-DTCU
0130-35034	PCB ASSY, STEPPER DRIVER PWR DISTR
0190-00387	MEI Motion Controller
0190-09939	OMS BOARD
0190-11525	CARD PIII 400MHZ 128MB RAM VME BUS SINGL
0190-35650	SERIPLEX MUX I/O PCB(5), (144H-175H)
0190-35774	MULTIPLEXED I/O CONTROL BOARD, CH B
0190-36251	PCB MATRIX INTERLOCK MCE
0190-36715	PCB G.P. I/O DISTRIBUTION
0660-01542	CARD VME BACKPLANE 21 SLOT J1 W/10 POS
0660-01647	CARD QUAD ELECTROMETER BRD STD/STABIL
0660-01738	CARDVME64 J1 BACKPLANE 10 SLOT BUS GRANT
0870-01028	DRVR 5-PHASE STEPPER MOTOR

※リスト以外のボードも入手可能な場合もありますので、お問い合わせ下さい。

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